SEMI OHT (Overhead Hoist Transport)

安装在轨道下方的半导体工艺间物流传输系统

▪ Minimum Turning Radius

▪ Dual Rail Track

▪ OHS & OHT Port Access

▪ Active Slide Architecture

▪ Compact & Slim Design

▪ Carrier Type                     FOUP, FOSB, Megazine, Tray, Cassette

▪ Curve Track Speed          0.7m/sec@500mm

▪ Elevator Speed                0.9m/sec

▪ Curve Radius                   R500mm (45˚, 90 ˚)

▪ Cleanliness                      Class 10@0.3㎛(Anti-Particle Design)                                

                                           Pkg- Class 1000@0.5㎛

SEMI Stocker

作为工艺间物流传输系统，负责FOUP的存储和传输功能

▪ Superior Cycle Time

▪ Flexible Port Configuration

▪ Optimize Safety Interlock

▪ Contact-less Power Supply

▪ Carrier Type                      FOUP, FOSB, Cassette, Megazine, Tray

▪ Movement Axes                X-axis, Z-axis, Turning, Forking

▪ Forking Time                     Forking Time: 2 sec

▪ Cleanliness                       Fab -Class 10@0.3㎛                                                                                           Pkg- Class 1000@0.5㎛

SEMI HT (High-speed Tower)

安装在半导体工程中有层间或段差区域, 把FOUP上下运送的设备

▪ Double Transport(2 FOUP) System

▪ Short Cycle Time

▪ Fast Moving Speed

▪ Fast Cargo(FOUP, FOSB) System Between Multi Floor

▪ Carrier Type                     300mm FOUP, FOSB

▪ Height                              25 ~ 60m

▪ Up/Down Speed              Max. 250m/min

▪ Cleanliness                      Fab -Class 10@0.3㎛                                

                                          Pkg- Class 1000@0.5㎛

Bank Stocker

Wafer Test  

- Bank(Wafer sorting / Split, Merge)  

- Storing & transport t in bank process during PKG&Test 

▪ Twin S-Master

▪ Storing over 1,000 cell

▪ Sorter Docking 

▪ Carrier Type                     FOUP, FOSB

▪ Movement Axes               X-axis, Z-axis, Turning, Forking

▪ Tact Time                         12 sec (Forking Time: 2 sec)

▪ Cleanliness                      Class 10@0.3㎛(Anti-Particle Design) 

Manual Station(FOUP In Out) System

System for in / out the product (FOUP, FOSB) from OHT

▪ Minimized Lay-Out composition is available    (800mm × 800mm)

▪ Easy to move

▪ Carrier Type                      FOUP, FOSB

▪ Movement Axes                 X-axis, Turning

▪ Speed                                0.25m/sec

▪ Cleanliness                        Class 10@0.3㎛(Anti-Particle Design)

Conveyor

FOUP，Cassette等可以水平移动，并且也可以作为缓冲区进行装载的物流系统

▪ Flexible with Module Unit

▪ Dual Belt for Minimum Tray Contact

▪ Miniaturization / weight lightening

▪ Driving Method                       Induction Motor / Inverter Control

▪ Speed                                     Max. 30m/min

▪ Drive(Turn)                             Servo Motor

▪ Turn Speed                             5sec / 90º, 8sec / 180º

▪ Traveling Speed                     15sec @ Stroke 1435mm